发明名称 COMPLEMENTARILY STRAINED FINFET STRUCTURE
摘要 A complementary fin field-effect transistor (FinFET) includes a p-type device having a p-channel fin. The p-channel fin may include a first material that is lattice mismatched relative to a semiconductor substrate. The first material may have a compressive strain. The FinFET device also includes an n-type device having an n-channel fin. The n-channel fin may include a second material having a tensile strain that is lattice mismatched relative to the semiconductor substrate. The p-type device and the n-type device cooperate to form the complementary FinFET device.
申请公布号 WO2015076956(A1) 申请公布日期 2015.05.28
申请号 WO2014US61204 申请日期 2014.10.17
申请人 QUALCOMM INCORPORATED 发明人 RIM, KERN;XU, JEFFREY JUNHAO;SONG, STANLEY SEUNGCHUL
分类号 H01L21/8238;H01L27/092;H01L29/10 主分类号 H01L21/8238
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