发明名称 CMP PAD CONDITIONER
摘要 The present invention relates to a chemical mechanical polishing (CMP) pad conditioner used in a CMP process of a semiconductor manufacturing process, and more specifically, to a CMP pad conditioner equipped with cutting segments which affect less in the erosion of a polishing pad regardless of slurry type and conditioner pressure.
申请公布号 KR20150058127(A) 申请公布日期 2015.05.28
申请号 KR20150065224 申请日期 2015.05.11
申请人 EHWA DIAMOND IND. CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SEH KWANG;KIM, YOUN CHUL;LEE, JOO HAN;CHOI, JAE KWANG;BOO, JAE PHIL
分类号 H01L21/304;H01L21/02 主分类号 H01L21/304
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