发明名称 DICING TAPE
摘要 Provided is a dicing tape from which a thin semiconductor chip can be efficiently picked up within a short time without the occurrence of chip cracking during a pick-up step after a dicing step. A dicing tape (1) of the present invention has an adhesive layer that contains 0.5-30 parts by mass of a phthalic acid ester per 100 parts by mass of one or more polymers that are selected from the group consisting of acrylic polymers, vinyl acetate polymers and acrylic-based polymers having a carbon-carbon double bond. The adhesive layer has a peel strength of 0.5 N/25 mm or more before radiation curing, while having a peel strength of 0.05-0.4 N/25 mm after radiation curing. If (i) is the peel strength at a peeling rate of 50 mm/min after radiation curing and (ii) is the peel strength at a peeling rate of 1,000 mm/min after radiation curing, (ii)/(i) is 1 or less.
申请公布号 SG11201502324T(A) 申请公布日期 2015.05.28
申请号 SGT11201502324 申请日期 2013.10.15
申请人 FURUKAWA ELECTRIC CO.,LTD. 发明人 SANO, TORU;YABUKI, AKIRA;TAMAGAWA, YURI;OTA, SATOSHI;AKUTSU, AKIRA;MATSUBARA, YUKIHIRO
分类号 H01L21/301;C09J7/02;C09J11/06;C09J131/04;C09J133/00 主分类号 H01L21/301
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