| 发明名称 |
ELECTROCHEMICALLY-ASSISTED MEGASONIC CLEANING SYSTEMS AND METHODS |
| 摘要 |
An electrochemically-assisted megasonic cleaning method includes applying an electrical potential to a conductive surface immersed in solution to form bubbles of gaseous molecules produced by electrochemical reaction, and applying a megasonic field to the solution to oscillate the bubbles and clean the conductive surface without causing damage. An electrochemically-assisted megasonic cleaning system includes an electrical supply for applying electrical potential to a conductive surface immersed in solution to induce bubble formation in the solution and at the surface through an electrochemical reaction, and a transducer for applying a megasonic field to the solution to induce oscillation of the bubbles. |
| 申请公布号 |
US2015144502(A1) |
申请公布日期 |
2015.05.28 |
| 申请号 |
US201414554279 |
申请日期 |
2014.11.26 |
| 申请人 |
The Arizona Board of Regents on Behalf of the University of Arizona |
发明人 |
Keswani Manish K.;Deymier Pierre A.;Raghavan Srini |
| 分类号 |
C25F1/00;B08B3/08;B08B3/12 |
主分类号 |
C25F1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Electrochemically-assisted megasonic cleaning method comprising:
applying electrical potential to a conductive surface immersed in solution to form bubbles of gaseous molecules produced by electrochemical reaction; and applying megasonic field to the solution to oscillate the bubbles and clean the conductive surface. |
| 地址 |
Tucson AZ US |
