MULTI-ACTUATOR DESIGN AND CONTROL FOR A HIGH-SPEED/LARGE-RANGE NANOPOSITIONING SYSTEM
摘要
Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
申请公布号
WO2015077440(A1)
申请公布日期
2015.05.28
申请号
WO2014US66586
申请日期
2014.11.20
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人
YOUCEF-TOUMI, KAMAL;BOZCHALOOI, IMAN, S.;HOUCK, ANDREW, C.