| 摘要 |
PROBLEM TO BE SOLVED: To provide a film formation apparatus which can keep constant distances between workpieces different in size and a target while achieving rotation and revolution of workpieces.SOLUTION: A rotary table unit 3 of a film formation apparatus 1 includes a rotary table 10, a first exchange unit 4 which has a first arm 21 supporting a first workpiece mounting part 22 freely rotatably and a second exchange unit 30 having a second arm 31 which supports a second workpiece mounting part 32 freely rotatably, and one of the exchange units 4 and 30 is attached freely removably to the rotary table 10. The lengths of the first and second arms 21 and 31 are such that distance between the position W1a of the workpiece W1 mounted on the first workpiece mounting part 22 opposite to a target ejection surface and the rotation center O of the rotary table 10 and the distance between the position W2a of the workpiece W2 mounted on the second workpiece mounting part 32 opposite to the target ejection surface and the rotation center O are both equal to R1. |
