| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of reducing impedance and improving a Q value.SOLUTION: An angular velocity sensor 1 comprises: a base part 10 extending along an XY plane defined by an X axis and a Y axis and including an intersecting point O of the X axis and the Y axis as seen from the Z axis direction, where three virtual axes intersecting each other at right angles are assumed to be the X axis, the Y axis, and the Z axis, respectively; a ring part 20 enclosing the base part 10 and extending in ring form centering around the intersecting point O; a support part 30 extending on the X axis from each of a +X side end and a -X side end of the base part 10 and connecting the base part 10 and the ring part 20; and six arm parts 21-26 extending from the ring part 20 toward the base part 10 on six virtual lines L1-L6 extending from the intersecting point O in radial form, three each to a +Y side and a -Y side, at 45 degree intervals with reference to the support part 30. Two arm parts 21, 23 among the six arm parts 21-26 constitute a drive part 40. |
