发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a configuration that can suppress a variation in parasitic capacitance caused by application of a voltage to a capacitor, and that facilitates highly-accurate determination of a substantial capacitance of the capacitor in a circuit, in a semiconductor device in which the capacitor is arranged above a semiconductor substrate.SOLUTION: In a semiconductor device 1, a capacitor C1 is laminated above a semiconductor substrate 15 via a first insulating film 8. In the semiconductor substrate 15, a first semiconductor layer 3 of a first conductivity type is formed at a position apart from a surface 15a, and a second semiconductor layer 5 of the first conductivity type having a configuration with an impurity concentration higher than that of the first semiconductor layer 3 is formed at a position closer to the surface 15a from the first semiconductor layer 3. In addition, the second semiconductor layer 5 has a configuration connected with a conducting path 21 of a predetermined potential.</p>
申请公布号 JP2015099819(A) 申请公布日期 2015.05.28
申请号 JP20130237857 申请日期 2013.11.18
申请人 DENSO CORP 发明人 KAMEOKA HIROSHI;YAMADA AKIRA;TAKAHASHI SHIGEKI
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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