| 主权项 |
1. A daily checking and calibrating method of a length measuring machine, comprising:
step (1) for detecting a state of the length measuring machine at a predetermined daily check time; step (2) for stopping transportation of substrates and the process goes to step (3) upon determining the length measuring machine is in an idle state, and for waiting until the length measuring machine transit to the idle state if the length measuring machine is in an operational state; step (3) for measuring coordinates of positioning marks on a substrate-carrying platform to generate a measured data file, and for comparing the measured coordinates of the positioning marks with predetermined standard coordinates; step (4) for automatically calculating a calibration value, updating the calibration value to a coordinate parameter file to complete automatic calibration, and automatically backing up the coordinate parameter file, and then the process goes to step (14) when a difference between the measured coordinates of the positioning marks and the predetermined standard coordinates is smaller than a predetermined value, and for activating an alarm and then the process goes to step (5) when the difference between the measured coordinates of the positioning marks and the standard coordinate is larger than the predetermined value; step (5) for determining follow-up measures when the difference between the measured coordinates of the positioning marks and the predetermined standard coordinates is larger than the predetermined value, the determination is made in accordance with a predicted reason causing the difference, and the follow-up measures comprises automatic calibration, no calibration, and additional measurements of large-scale substrate; step (6)—the process goes to step (7) upon choosing the automatic calibration, the process goes to step (13) upon determining not to apply the automatic calibration, and the process goes to step (8) upon choosing the additional measurement of the large-scale substrate; step (7) for automatically calculating the calibration value basing on the measured data file generated in step (3), updating the calibration value to the coordinate parameter file to complete the automatic calibration, and backing up the original coordinate parameter file and the process goes to step (14); step (8) for measuring the coordinates of confirmation marks of the large-scale substrate on the substrate-carrying platform to generate a substrate-measured-data file, and for comparing the measured coordinates of the confirmation marks and the predetermined confirmation coordinates; step (9) for automatically calculating the calibration value basing on the measured data file generated in step (3), updating the calibration value to the coordinate parameter file to complete the automatic calibration and the process goes to step (14), and automatically backing up the coordinate parameter file when the difference between the measured coordinate of the confirmation marks and the predetermined confirmation coordinate is smaller than the predetermined value, and for activating the alarm and the process goes to step (10) when the difference between the measured coordinates of the confirmation marks and the predetermined confirmation coordinates is larger than the predetermined value; step (10) for determining the follow-up measures when the difference between the measured coordinates of the confirmation marks and the predetermined confirmation coordinates is larger than the predetermined value, the determination is made in accordance with a predicted reason causing the difference, and the follow-up measures comprises applying automatic calibration or not to apply automatic calibration; step (11) for executing the automatic calibration and the process goes to step (12), and the process goes to step (13) when the follow-up measure is not to apply automatic calibration; step (12) for automatically calculating the calibration value basing on the measured data file generated in step (3), updating the calibration value to the coordinate parameter file to complete the automatic calibration, and backing up the original coordinate parameter and the process goes to step (14); step (13)—the process goes to step (14) upon determining not to apply the automatic calibration, and the process goes to step (15) upon determining the length measuring machine is in an abnormal operation state comprising components dislocations and abnormal temperature; step (14) for resuming a substrate-transportation function and the process ends; and step (15) for notifying of the abnormal operation state of the length measuring machine, and the process ends. |
