DEVICE AND METHOD FOR MICRO-ELECTRO-MECHANICAL-SYSTEM PHOTONIC SWITCH

摘要

In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators(102) including a first collimator configured to receive a first traffic optical beam having a traffic wavelength and a first control optical beam having a control wavelength, where a first focal length of the first collimators(102) at the traffic wavelength is different than a second focal length of the first collimators(102) at the control wavelength. The MEMS photonic switch also includes a first mirror array(104) optically coupled to the first plurality of collimators(102), where the first mirror array(104) including a first plurality of first MEMS mirrors(322) integrated on a first substrate and a first plurality of first photodiodes(324) integrated on the first substrate, where the photodiodes(324) are disposed in interstitial spaces between the MEMS mirrors(322).