发明名称 波面収差測定装置
摘要 <p>A wavefront aberration measuring apparatus comprising: an illumination optical system provided to an incident side of a test lens; and a measuring optical system provided to an exit side of the test lens, the illumination optical system including an aperture stop capable of being opened and closed, and the illumination optical system being movable along an optical axis of the illumination optical system so as to adjust positions of the aperture stop and an entrance pupil of the test lens to have an optically conjugate relation with each other. Accordingly, it becomes possible to provide a wavefront aberration measuring apparatus capable of suppressing errors in measured result.</p>
申请公布号 JP5725018(B2) 申请公布日期 2015.05.27
申请号 JP20120509648 申请日期 2011.04.04
申请人 发明人
分类号 G01M11/02 主分类号 G01M11/02
代理机构 代理人
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