| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a graphite crucible for single crystal pulling devices allowing prolongation of the service lifetime and its manufacturing method. <P>SOLUTION: The graphite crucible 2 holding a quartz crucible 1 includes a graphite crucible substrate 3 as a graphite crucible formed body and a pyrolytic carbon film 4 formed on the whole surface of the graphite crucible substrate 3. The film 4 is formed to the inner surface of open pores present in the surface of the graphite crucible substrate 3. The film 4 is formed by the CVI method. The film 4 may be formed on the whole surface of the graphite crucible or only in such parts of the surface where conversion into SiC easily advances. More specifically, the film 4 may be precipitated entirely on the inside surface of the crucible, merely on bent parts, or on small R parts, of the inside surface or merely on bent parts and straight body parts. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
