Method and device for analysing nanostructure array images

摘要

Methods and devices for analyzing nanostructure array images are disclosed. Images of arrays of nanostructures are converted to representations in a coordinate system and the defectivity of said array of nanostructures is measured. Aspects of the methods include converting the image of the array of nanostructures to a representation in a coordinate system. Said conversion may comprise identifying a plurality of line structures in the image and generating a network of coordinates for each line structure. Then a reference defectivity metric may be compared with an identified metric related to the nanostructure during said conversion of the image in said coordinate system. When the identified metric does not satisfy a condition of the reference defectivity metric, then the array of nanostructures may be considered defective.