发明名称 |
SiC SINGLE CRYSTAL INGOT AND PRODUCTION METHOD THEREFOR |
摘要 |
Provided are: a high-quality SiC single crystal ingot that suppresses the generation of inclusions; and a production method for said SiC single crystal ingot. The present invention pertains to a SiC single crystal ingot including a seed crystal substrate and a SiC growth crystal grown using the solution method and using the seed crystal substrate as the origin thereof, said growth crystal having a recessed crystal growth surface and not including inclusions. |
申请公布号 |
EP2876190(A1) |
申请公布日期 |
2015.05.27 |
申请号 |
EP20130820560 |
申请日期 |
2013.05.08 |
申请人 |
TOYOTA JIDOSHA KABUSHIKI KAISHA;NIPPON STEEL & SUMITOMO METAL CORPORATION |
发明人 |
KADO, MOTOHISA;DAIKOKU, HIRONORI;SAKAMOTO, HIDEMITSU;KUSUNOKI, KAZUHIKO;OKADA, NOBUHIRO |
分类号 |
C30B29/36;C30B9/06;C30B17/00;C30B19/04;C30B19/06;C30B19/10 |
主分类号 |
C30B29/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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