发明名称 |
VAPOR DEPOSITION MASK AND MANUFACTURING METHOD OF VAPOR DEPOSITION MASK |
摘要 |
The present invention provides a vapor deposition mask which can deposit a layer of a deposition material while maintaining high material usage efficiency. The vapor deposition mask comprises a metal sheet having a first surface, a second surface disposed on an opposite side of the first surface, and a penetration hole formed thereon to extend between the first surface and the second surface. A recess is formed on the first surface of the metal sheet to extend in a line. A hole is formed on the second surface of the metal sheet. The recess and the hole are connected, and the penetration hole penetrates the metal sheet by the recess and the hole. |
申请公布号 |
KR20150056754(A) |
申请公布日期 |
2015.05.27 |
申请号 |
KR20150061600 |
申请日期 |
2015.04.30 |
申请人 |
DAI NIPPON PRINTING CO., LTD. |
发明人 |
OGAWA KAZUYA |
分类号 |
H01L21/266;H01L21/205;H01L51/00 |
主分类号 |
H01L21/266 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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