| 摘要 |
FIELD: chemistry.SUBSTANCE: invention relates to chemical industry. System for monosilane obtaining contains reaction column (100) with feeding pipe (101) for trichlorosilane supply and with discharge pipe (102) for obtained silicon tetrachloride with one condenser (103), which serves for discharge of obtained monosilane from reaction column. Reaction column contains two reactive/distillation reaction zones (104, 105), which work at different temperatures and contain different catalytically active solid substances.EFFECT: invention makes it possible to increase rate of converting trichlorosilane into monosilane-containing mixture.11 cl, 1 dwg |
