Device for variable deflection of light

摘要

A device (100) for variable deflection of light is described, encompassing a micromechanical mirror arrangement (14) having a plurality of light-reflecting mirror actuators (18, 20, 22, 24, 26), and a control unit (32) with which the mirror actuators (18, 20, 22, 24, 26) are controllable into different reflection positions in order to vary the light deflection. The device (100) has a back-reflection structure (60), systematically adapted to the mirror arrangement (14), for reflecting back onto another portion of the mirror actuators (18, 20, 22, 24, 26), in targeted fashion, the light reflected onto the back-reflection structure (60) from one portion of the mirror actuators (18, 20, 22, 24, 26).

主权项

1. A device for variable deflection of light, encompassing
a micromechanical mirror arrangement having a plurality of light-reflecting mirror actuators, and a control unit with which the mirror actuators are controllable into different reflection positions in order to vary the light deflection, characterized by a back-reflection structure, systematically adapted to the mirror arrangement, for reflecting back onto another portion of the mirror actuators, in targeted fashion, the light reflected onto the back-reflection structure from one portion of the mirror actuators; wherein the back-reflection structure comprises multiple reflection elements and multiple transparent transmission elements, at least one of the transmission elements constituting a light entry region for the light to be deflected, while the other transmission elements constitute light exit regions for the light reflected at the mirror actuators, and the light entering the light entry region is selectably deflectable into one of the light exit regions as a function of the reflection positions of the light-reflecting mirror actuators.