Robot having repeatable disturbance compensation algorithm

摘要

A controller for a substrate transport apparatus. The controller includes a first system and a second system for at least partially controlling a movement of a motor of the substrate transport apparatus. The first system is configured to control the movement of the motor based upon a signal from a position sensor. The position sensor outputs the signal based upon a position of a rotor of the motor relative to a stator of the motor. Torque output of the motor is at least partially controlled based upon the signal from the position sensor. The second system for at least partially controlling the movement of the motor is based upon expected disturbances during movement of an arm of the substrate transport apparatus by the motor, where the second system is configured to at least partially increase and/or decrease the torque output of the motor by first system.

主权项

1. A controller for a substrate transport apparatus, the controller comprising:
a first system for at least partially controlling a movement of a motor of the substrate transport apparatus based upon a signal from a position sensor, where the position sensor outputs the signal based upon a position of a rotor of the motor relative to a stator of the motor, where torque output of the motor is at least partially controlled based upon the signal from the position sensor; and a second system for at least partially controlling the movement of the motor based upon expected disturbances during movement of an arm of the substrate transport apparatus by the motor, where the second system comprises a repeatable disturbance compensation algorithm, where the second system including the repeatable disturbance compensation algorithm is configured to at least partially increase and/or decrease the torque output of the motor by the first system.