Defect inspection device and defect inspection method

摘要

A defect inspection device has: an illumination optical system which irradiates a predetermined region of an inspection target with illumination light; a detection optical system which has a detector provided with a plurality of pixels by which scattered light from the predetermined region of the inspection target due to illumination light from the illumination optical system can be detected; and a signal processing portion which is provided with a correction portion which corrects pixel displacement caused by change in a direction perpendicular to a surface of the inspection target with respect to a detection signal based on the scattered light detected by the detector of the detection optical system, and a defect determination portion which determines a defect on the surface of the inspection target based on the detection signal corrected by the correction portion.

主权项

1. A defect inspection method comprising the steps of:
irradiating a predetermined region of an inspection target with illumination light by an illumination optical system; detecting a plurality of scattered lights scattered from the predetermined region of the inspection target illuminated by the illumination step, by a detection optical system having a plurality of detectors each provided with a plurality of pixels by which the scattered light can be detected in a manner that the plurality of detectors detect the scattered light in different azimuth angle directions with respect to the surface of the inspection target, respectively; adding up a plurality of detection signals based on the plurality of scattered lights detected by the detection step with respect to the plurality of scattered lights substantially from one and the same region of the inspection target to thereby determine a defect on the surface of the inspection target; and translationally moving the inspection target by a pitch of a size different from an integer multiple of a pixel number of one pixel in the plurality of detectors.