Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program

摘要

Disclosed is a liquid processing apparatus capable of accurately determining a holding state of a substrate without being influenced by, for example, material or surface condition of a substrate. The liquid processing apparatus includes a substrate holding unit that holds a substrate, a camera that photographs a region where a peripheral edge portion of substrate is present when substrate is properly held by the substrate holding unit, and a control unit that determines a holding state of the substrate held by the substrate holding unit based on an image photographed by the camera.

主权项

1. An apparatus for processing a substrate comprising:
a substrate holding unit configured to hold a substrate; a processing liquid supply unit connected to a processing liquid supply source and configured to supply a processing liquid to the substrate; a camera configured to photograph a region where a peripheral edge portion of the substrate is present when the substrate is properly held by the substrate holding unit; and a control unit configured to determine whether the substrate is properly held by the substrate holding unit by comparing an image of an actual holding state of the substrate photographed by the camera with a reference image prepared in advance representing a normal holding state of the substrate in which the substrate is properly held by the substrate holding unit, wherein the control unit is further configured to calculate a coincidence ratio between the photographed image and the reference image, determine that the substrate is properly held by the substrate holding unit when the coincidence ratio is equal to or more than a predetermined value, and determine that the substrate is not properly held by the substrate holding unit when the coincidence ratio is less than the predetermined value.