| 发明名称 | Highly-reliable micro-electromechanical system temperature sensor | ||
| 摘要 | A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures is disclosed. The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the multimorph sensor, the sensor coil and the readout coil. | ||
| 申请公布号 | US9039280(B2) | 申请公布日期 | 2015.05.26 |
| 申请号 | US201313747433 | 申请日期 | 2013.01.22 |
| 申请人 | Purdue Research Foundation | 发明人 | Peroulis Dimitrios;Kovacs Andrew S;Koester David Joseph;Sadeghi Farshid;Scott Sean M;Adams Douglas Edward |
| 分类号 | G01K7/00;G01K7/34;G01K1/02;G01K13/08 | 主分类号 | G01K7/00 |
| 代理机构 | Wilmer Cutler Pickering Hale and Dorr LLP | 代理人 | Wilmer Cutler Pickering Hale and Dorr LLP |
| 主权项 | 1. A micro-electromechanical system-type (MEMS) wireless temperature measurement system, comprising: a MEMS sensor arrangement, including: a multimorph sensor,a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of a natural frequency of the multimorph sensor, the sensor coil and the readout coil; an energizing circuit configured to energize the readout coil; and a readout circuit configured to measure the natural frequency. | ||
| 地址 | West Lafayette IN US | ||