发明名称 Power distortion-based servo control systems for frequency tuning RF power sources
摘要 A radio frequency system includes a power amplifier that outputs a radio frequency signal to a matching network via a transmission line between the power amplifier and the matching network. A sensor monitors the radio frequency signal and generates first sensor signals based on the radio frequency signal. A distortion module determines a first distortion value according to at least one of (i) a sinusoidal function of the first sensor signals and (ii) a cross-correlation function of the first sensor signals. A first correction circuit (i) generates a first impedance tuning value based on the first distortion value and a first predetermined value, and (ii) provides feedforward control of impedance matching performed within the matching network including outputting the first impedance tuning value to one of the power amplifier and the matching network.
申请公布号 US9041471(B2) 申请公布日期 2015.05.26
申请号 US201314044547 申请日期 2013.10.02
申请人 MKS Instruments, Inc. 发明人 Coumou David J.
分类号 H03F3/191;H03F1/56;H03F1/32;H03F3/189 主分类号 H03F3/191
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A radio frequency system comprising: a power amplifier that outputs a radio frequency signal to a matching network via a transmission line between the power amplifier and the matching network; a sensor monitoring the radio frequency signal and generating first sensor signals based on the radio frequency signal; a distortion module determining a first distortion value according to a sinusoidal function of the first sensor signals; and a first correction circuit (i) generating a first impedance tuning value based on the first distortion value and a first predetermined value, and (ii) providing feedforward control of impedance matching performed within the matching network including outputting the first impedance turning value to one of the power amplifier and the matching network.
地址 Andover MA US