发明名称 Semiconductor package and method for manufacturing the same
摘要 A semiconductor package includes a semiconductor chip having a front surface and a back surface facing away from the front surface; a through electrode formed in the semiconductor chip and passing through the front surface and the back surface; and a contamination preventing layer formed in the semiconductor chip, the through electrode passing through the contamination preventing layer.
申请公布号 US9040419(B2) 申请公布日期 2015.05.26
申请号 US201414334406 申请日期 2014.07.17
申请人 SK Hynix Inc. 发明人 Son Ho Young
分类号 H01L21/44;H01L21/768;H01L23/00 主分类号 H01L21/44
代理机构 William Park & Associates Patent Ltd. 代理人 William Park & Associates Patent Ltd.
主权项 1. A method for manufacturing a semiconductor package, comprising: preparing a semiconductor chip which has a front surface and a back surface facing away from the front surface; forming a contamination preventing layer in the semiconductor chip; forming a through electrode from the front surface of the semiconductor chip to a depth that passes through the contamination preventing layer; and removing a portion of the back surface of the semiconductor chip to expose the through electrode.
地址 Gyeonggi-do KR