发明名称 |
Semiconductor package and method for manufacturing the same |
摘要 |
A semiconductor package includes a semiconductor chip having a front surface and a back surface facing away from the front surface; a through electrode formed in the semiconductor chip and passing through the front surface and the back surface; and a contamination preventing layer formed in the semiconductor chip, the through electrode passing through the contamination preventing layer. |
申请公布号 |
US9040419(B2) |
申请公布日期 |
2015.05.26 |
申请号 |
US201414334406 |
申请日期 |
2014.07.17 |
申请人 |
SK Hynix Inc. |
发明人 |
Son Ho Young |
分类号 |
H01L21/44;H01L21/768;H01L23/00 |
主分类号 |
H01L21/44 |
代理机构 |
William Park & Associates Patent Ltd. |
代理人 |
William Park & Associates Patent Ltd. |
主权项 |
1. A method for manufacturing a semiconductor package, comprising:
preparing a semiconductor chip which has a front surface and a back surface facing away from the front surface; forming a contamination preventing layer in the semiconductor chip; forming a through electrode from the front surface of the semiconductor chip to a depth that passes through the contamination preventing layer; and removing a portion of the back surface of the semiconductor chip to expose the through electrode. |
地址 |
Gyeonggi-do KR |