Metal-insulator-metal capacitor structures

摘要

Capacitor structures capable of providing both low-voltage capacitors and high-voltage capacitors are described herein. In one embodiment, a capacitor structure comprises a low-voltage capacitor and a high-voltage capacitor. The low-voltage capacitor comprises a first electrode formed from a first metal layer, a second electrode formed from a second metal layer, a third electrode formed from a third metal layer, a first dielectric layer between the first and second electrodes, and a second dielectric layer between the second and third electrodes. The high-voltage capacitor comprises a fourth electrode formed from the first metal layer, a fifth electrode formed from the third metal layer, and a third dielectric layer between the fourth and fifth electrodes, wherein the third dielectric layer is thicker than either the first dielectric layer or the second dielectric layer.

主权项

1. A capacitor structure, comprising:
a low-voltage capacitor, wherein the low-voltage capacitor comprises:
a first electrode formed from a first metal layer;a second electrode formed from a second metal layer;a third electrode formed from a third metal layer;a first dielectric layer between the first and second electrodes; anda second dielectric layer between the second and third electrodes; and a high-voltage capacitor, wherein the high-voltage capacitor comprises:
a fourth electrode formed from the first metal layer;a fifth electrode formed from the third metal layer; anda third dielectric layer between the fourth and fifth electrodes;wherein the third dielectric layer is thicker than either the first dielectric layer or the second dielectric layer, and the first and third electrodes are coupled to a first power-supply rail and the second electrode is coupled to a second power-supply rail.