Inductively coupled plasma reactor with multiple magnetic cores

摘要

There is provided an inductively coupled plasma reactor. The inductively coupled plasma reactor is connected to a transformer with multiple magnetic cores and a primary winding, to transfer an electromotive force for plasma discharge to a plasma discharge chamber of a reactor body. Parts of magnetic core positioned in side the plasma discharge chamber are protected by being entirely covered by a core protecting tube. The primary winding is electrically connected to a power supply source providing radio frequency power. In the inductively coupled plasma reactor, since a number of magnetic core cross sectional parts are positioned inside the plasma discharge chamber, the efficiency of transferring the inductively coupled energy to be connected with plasma is very high.

主权项

1. An inductively coupled plasma reactor comprising:
a reactor body comprising a plurality of plasma discharge chambers; a transformer comprising a magnetic core and a primary winding, the magnetic core being positioned inside at least two of the plurality of plasma discharge chambers and a part of the magnetic core is externally exposed out of the reactor body; a core protecting tube to cover and protect parts of the magnetic core; and a power supply source connected to the primary winding, wherein a current of the primary winding is driven by the power supply source, the driving current of the primary winding induces AC potential which generates inductively coupled plasma to complete a secondary circuit of the transformer, and the inductively coupled plasma is generated in the plasma discharge chamber to cover the outside of the core protecting tube.