Voltage-driven intelligent characterization bench for semiconductor

摘要

A system for testing a plurality of transistors on a wafer having a storage device or personal computer connected via a bus to a plurality of drivers. Each of the voltage drivers having a microcontroller adapted to receive test parameters and provide test data from a plurality of voltage drivers. By utilizing a bus structure, the personal computer can look on one bus for flags indicating test data is available from a driver and receive the data. In addition a bus may be used to provide test parameters to the drivers. In this manner, multiple drivers may be run at the same time incorporating multiple tests. When data is available it is transferred to the personal computer, for providing test parameters to a plurality of drivers, and connected via a second bus for receiving test results from the plurality of drivers.

主权项

1. A system for testing a plurality of semiconductor devices, said system comprising:
a storage device for storing data; and a plurality of driver channels, each driver channel connected to the storage device via a bus, each driver channel configured to be connected to a respective semiconductor device of the plurality of semiconductor devices under test; wherein the plurality of driver channels are configured to independently and simultaneously test, using test parameters, the respective semiconductor device to which each driver channel is connected, and provide test results from the test to the storage device; wherein each driver channel comprises:
a first voltage driver connected to the respective semiconductor device and having a first input for the respective semiconductor device;a second voltage driver connected to the respective semiconductor device and having a second input for the respective semiconductor device;a microcontroller configured to receive the test parameters from the storage device and set the test parameters in the first voltage driver and the second voltage driver; anda first set of optical switches in the first voltage driver and a second set of optical switches in the second voltage driver, wherein all connections between the respective semiconductor device under test and both the first voltage driver and the second voltage driver are simultaneously grounded upon all optical switches of the first set and the second set of optical switches being closed.