| 摘要 |
A main antenna connected to a high frequency power source, and an auxiliary antenna electrically insulated (in a state of floating) from corresponding the main antenna are disposed. Additionally, when viewing the main antenna and the auxiliary antenna at a plane, each projection area are adjusted not to be superposed. More specifically, the main antenna is disposed in a downstream side of the rotary direction of a rotary table. Then, an electromagnetic field is generated in the auxiliary antenna through an induction current flowing in the main antenna and the auxiliary antenna is resonated to generate inductive plasma not only in an area of a lower part of the main antenna but also in an area of a lower part of the auxiliary antenna. |
