| 摘要 |
The number of returned pieces per unit time is increased. A first returning device takes a substrate out from a cassette and returns. A first storage part stores the substrate returned by the first returning device. A first substrate process unit is divided into at least two groups arranged in a height direction, and performs a certain process on the substrate. A second storage part corresponds to each of the groups, and is arranged in line with the first storage part in the height direction. A second returning device corresponds to each of the groups, and is arranged in line with the first storage part and the second storage part in the height direction. A transfer device transfers the substrate between the first storage part and the second storage part, and returns the substrate between the first storage part and the second storage part. |
