发明名称 |
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY |
摘要 |
Embodiments include automatic selection of sample values for optical metrology. An embodiment of a method includes providing a library parameter space for modeling of a diffracting structure using an optical metrology system; automatically determining by a processing unit a reduced sampling set from the library parameter space, wherein the reduced space is based on one or both of the following recommending a sampling shape based on an expected sample space usage, or recommending a sampling filter based on correlation between two or more parameters of the library parameter space; and generating a library for the optical metrology system using the reduced sampling set. |
申请公布号 |
US2015142395(A1) |
申请公布日期 |
2015.05.21 |
申请号 |
US201414542546 |
申请日期 |
2014.11.15 |
申请人 |
Cao Meng;Poslavsky Leonid;Kim Inkyo;Lee Lie-Quan |
发明人 |
Cao Meng;Poslavsky Leonid;Kim Inkyo;Lee Lie-Quan |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
providing a library parameter space for modeling of a diffracting structure using an optical metrology system; automatically determining by a processing unit a reduced sampling set from the library parameter space, wherein the reduced space is based on one or both of the following:
recommending a sampling shape based on an expected sample space usage, orrecommending a sampling filter based on correlation between two or more parameters of the library parameter space; and generating a library for the optical metrology system using the reduced sampling set. |
地址 |
Union City CA US |