Resistive Random Access Memory (RRAM) with Improved Forming Voltage Characteristics and Method for Making

摘要

The present disclosure provides resistive random access memory (RRAM) structures and methods of making the same. The RRAM structures include a bottom electrode having protruded step portion that allows formation of a self-aligned conductive path with a top electrode during operation. The protruded step portion may have an inclination angle of about 30 degrees to 150 degrees. Multiple RRAM structures may be formed by etching through a RRAM stack.

主权项

1. A resistive random access memory (RRAM), comprising:
a bottom electrode having a protruded step portion; a resistive material layer conformally covering the protruded step portion of the bottom electrode; and a top electrode over the resistive material layer.