| 发明名称 |
FILM-FORMING APPARATUS AND FILM-FORMING METHOD |
| 摘要 |
There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism. |
| 申请公布号 |
US2015140212(A1) |
申请公布日期 |
2015.05.21 |
| 申请号 |
US201314402244 |
申请日期 |
2013.04.24 |
| 申请人 |
Sony Corporation |
发明人 |
Kobayashi Toshiyuki;Shimizu Keisuke;Kadono Koji;Mizuguchi Yukiko;Murakami Yosuke |
| 分类号 |
C23C16/458;C23C16/54;C23C16/52;C23C16/26;C23C16/46 |
主分类号 |
C23C16/458 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A film-forming apparatus, comprising:
a roll-to-roll mechanism configured to transport a film-forming target and including a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target; and a heating unit configured to heat the film-forming target transported by the roll-to-roll mechanism. |
| 地址 |
Tokyo JP |
