发明名称 |
ELECTRICALLY CONDUCTIVE DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
An electrically conductive device and a manufacturing method thereof are provided. According to an exemplary embodiment, an electrically conductive device includes a graphene layer on a substrate, a protein tube portion on the graphene layer, and a conductor penetrating through the protein tube potion to the graphene layer, wherein the conductor is in electrical contact with the graphene layer. |
申请公布号 |
US2015137370(A1) |
申请公布日期 |
2015.05.21 |
申请号 |
US201414560729 |
申请日期 |
2014.12.04 |
申请人 |
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION ;SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION |
发明人 |
WANG Xinpeng;ZHANG Haiyang |
分类号 |
H01L23/528;H01L23/532 |
主分类号 |
H01L23/528 |
代理机构 |
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代理人 |
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主权项 |
1. An electrically conductive device comprising:
a graphene layer on a substrate; a protein tube portion on the graphene layer; and a conductor penetrating through the protein tube potion to the graphene layer, wherein the conductor is in electrical contact with the graphene layer. |
地址 |
Shanghai CN |