发明名称 SALT AND METHOD OF PRODUCING ACID GENERATOR
摘要 PROBLEM TO BE SOLVED: To provide an intermediate used for producing an acid generator in a high yield.SOLUTION: A salt is represented by formula (I0) [where Lrepresents a C-Cdivalent hydrocarbon group; -CH- contained in the divalent hydrocarbon group may be substituted with -O- or -CO-; Qand Qeach independently represents a fluorine atom or a C-Cperfluoroalkyl group; Zrepresents an m-valent organic cation or inorganic cation; and m represents 1 or 2].
申请公布号 JP2015096523(A) 申请公布日期 2015.05.21
申请号 JP20140247782 申请日期 2014.12.08
申请人 SUMITOMO CHEMICAL CO LTD 发明人 YOSHIDA ISAO;ICHIKAWA KOJI
分类号 C07D233/60;C07C381/12;C07D333/46;C09K3/00;G03F7/004;G03F7/039;H01L21/027 主分类号 C07D233/60
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