发明名称 |
SALT AND METHOD OF PRODUCING ACID GENERATOR |
摘要 |
PROBLEM TO BE SOLVED: To provide an intermediate used for producing an acid generator in a high yield.SOLUTION: A salt is represented by formula (I0) [where Lrepresents a C-Cdivalent hydrocarbon group; -CH- contained in the divalent hydrocarbon group may be substituted with -O- or -CO-; Qand Qeach independently represents a fluorine atom or a C-Cperfluoroalkyl group; Zrepresents an m-valent organic cation or inorganic cation; and m represents 1 or 2]. |
申请公布号 |
JP2015096523(A) |
申请公布日期 |
2015.05.21 |
申请号 |
JP20140247782 |
申请日期 |
2014.12.08 |
申请人 |
SUMITOMO CHEMICAL CO LTD |
发明人 |
YOSHIDA ISAO;ICHIKAWA KOJI |
分类号 |
C07D233/60;C07C381/12;C07D333/46;C09K3/00;G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
C07D233/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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