| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration element, a vibrator, an oscillator, an electronic device and a mobile object, which have superior vibration characteristics.SOLUTION: A vibration element comprises: vibration arms 5 and 6; first bottomed grooves 55 and 65 which are provided in the vibration arms 5 and 6 on one principal plane side thereof, and open to the principal plane side; and second bottomed grooves 56 and 66 provided on the other principal plane side. At least a part of each vibration arm has a region satisfying the following relations in the extending direction thereof: 4.236×10×η-8.473×10×η+4.414×10[μm]≤W[μm]≤-3.367×10×η+7.112×10×η-2.352×10[μm]; and 0.75≤η<1.00, where T represents a thickness of the vibration arms, W represents the width between the outer edge of each vibration arm and the groove along a direction orthogonal to an extending direction of the vibration arms in the principal plane in plane view, ta represents the total depth of each groove, andηrepresents ta/T. Supposing that the length of the vibration arm in the extending direction is L, and the length of a weight part thereof in the extending direction is H, the lengths L and H satisfy the following relation: 0.012<H/L<0.30.</p> |
