High Throughput Imprint Based on Contact Line Motion Tracking Control

摘要

Systems for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.

主权项

1. A control system for controlling contact transition and conformation between a template and a substrate during imprinting of polymerizable material on the substrate, the control system comprising:
an imprint head having a plurality of actuators capable of providing a pre-determined amount of force to template; a chuck positioned adjacent to template and capable of providing a pre-determined amount of pressure to template, the pre-determined amount of force and pre-determined amount of pressure providing an applied force and an applied pressure on template resulting in a velocity of the contact line between template and substrate and a height profile between template and substrate, the height profile defined by a varying distance in the form of curvature of a template region adjacent to but not contacting the substrate; at least one force sensor positioned between template and substrate and capable of providing a first signal of applied force and applied pressure on template; and, a controller in communication with the force sensor, actuators, and chuck, the controller capable of receiving the first signal from the force sensor and evaluating the first signal to provide a second signal to actuators and chuck, the second signal having an adjusted force and an adjusted pressure to provide an adjusted velocity of the contact line between template and substrate and an adjusted height profile between template and substrate.