发明名称 OBJECT IMAGING METHOD AND INSPECTION SYSTEM
摘要 Provided are an object imaging method and a ray inspection system. The method comprises: in a single process where a ray source scans multiple areas of an object, the ray source and the object moving relative to each other; in the single scan process, the ray source switching in two or more working states and being provided with corresponding ray energy or a dosage rate; receiving rays that are transmitted or scattered through the object; based on the rays that are received, obtaining parts of a scanned image in one of the multiple areas under each working state of the ray source; and combining the obtained parts of the scanned image. Using the method and the system that are disclosed can consider requirements of an inspected object in different areas in a single scan process in a condition where no cost is increased so as to implement measurement on multiple areas in an object.
申请公布号 WO2015070797(A1) 申请公布日期 2015.05.21
申请号 WO2014CN91125 申请日期 2014.11.14
申请人 TSINGHUA UNIVERSITY;NUCTECH COMPANY LIMITED 发明人 KANG, KEJUN;LI, JIANMIN;LI, YING;LI, YUANJING;YIN, WEI;ZHENG, JUAN;ZENG, LEI
分类号 G01N23/00 主分类号 G01N23/00
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