ACOUSTIC DEVICE AND MICROPHONE PACKAGE INCLUDING THE SAME

摘要

There are provided an acoustic device manufactured using a micro electro mechanical system (MEMS) technology, and a microphone package including the acoustic device. The acoustic device includes a device substrate including a cavity formed therein, a diaphragm formed to cover the cavity on the device substrate, a back plate formed to be spaced apart from the diaphragm, and a shielding plate disposed to be spaced apart from the diaphragm and the back plate, including a plurality of through holes, and shielding noise introduced from outside.

主权项

1. An acoustic device comprising:
a device substrate including a cavity formed therein; a diaphragm formed to cover the cavity on the device substrate; a back plate formed to be spaced apart from the diaphragm; and a shielding plate disposed to be spaced apart from the diaphragm and the back plate, including a plurality of through holes therein, and blocking noise introduced from outside.