GRADED DIELECTRIC STRUCTURES

摘要

Graded dielectric layers and methods of fabricating such dielectric layers provide dielectrics in a variety of electronic structures for use in a wide range of electronic devices and systems. In an embodiment, a dielectric layer is graded with respect to a doping profile across the dielectric layer. In an embodiment, a dielectric layer is graded with respect to a crystalline structure profile across the dielectric layer. In an embodiment, a dielectric layer is formed by atomic layer deposition incorporating sequencing techniques to generate a doped dielectric material.

主权项

1. An electronic device comprising:
a graded dielectric layer in an integrated circuit, the graded dielectric layer having one or more of a doping profile with the graded dielectric layer configured substantially as atomic monolayers across the graded dielectric layer or a structure profile that varies across the graded dielectric layer.