发明名称 RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
摘要 A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article a solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3.
申请公布号 WO2015073458(A1) 申请公布日期 2015.05.21
申请号 WO2014US65080 申请日期 2014.11.11
申请人 APPLIED MATERIALS, INC. 发明人 SUN, JENNIFER Y.;KANUNGO, BIRAJA P.
分类号 C04B35/505;C04B35/14;C04B35/48 主分类号 C04B35/505
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