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发明名称
旋转式曝光载送设备
摘要
申请公布号
TWI485533
申请公布日期
2015.05.21
申请号
TW101125310
申请日期
2012.07.13
申请人
崇鼎科技有限公司
发明人
刘维林
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
林志青 台北市信义区松隆路102号18楼之1
主权项
一种旋转式曝光载送设备,用于载送一基材以进行曝光,该旋转式曝光载送设备包含:一承载装置,将该基材固定于该承载装置上,而承载该基材;一转动式移动装置,具有一转动机构、一驱动机构及一输送机构,该输送机构连接该驱动机构,该输送机构使该转动机构沿着一曝光路径移动,且该转动机构以一转动轴心线转动该承载装置;以及一曝光装置,设置于该曝光路径之侧边位置处,该基材被该输送机构移动的过程中,固定于该承载装置的该基材以该转动轴心线之延伸方向为旋转轴向而旋转且受到该曝光装置照射而被曝光。
地址
桃园市中坜区东园路38之2号
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