PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE, AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an immersion type projection optical system that is a catadioptric type and an off-axis visual field type, and can reduce a range where a liquid (immersion liquid) exists in an image space.SOLUTION: A projection optical system that projects a reduced image of a first surface onto a second surface through a liquid and includes a refractive optical element Lp arranged on the most second surface side; an emission surface Lpb of the refractive optical element has a shape substantially symmetric with respect to two axial directions (X direction and Y direction) orthogonally crossing on the second surface; the central axial line Lpba on the emission surface substantially coincides with the central axial line 40a of a circle 40 corresponding to the circumference of an incidence surface Lpa of the refractive optical element; the central axial line of the emission surface is eccentric from an optical axis AX along one of the two axial directions (Y direction).