发明名称 Vorratsbehälter für eine Beschichtungsanlage und Beschichtungsanlage
摘要 <p>What is specified is a storage vessel (1) for a starting material (2) for producing a layer on a substrate by means of a growth process in a coating installation (10), wherein the storage vessel (1) has an internal volume for the starting material (2), in which there is a temperature-compensating material (3) which is inert with respect to the starting material (2). Furthermore, a coating installation (10) having a storage vessel (1) is specified.</p>
申请公布号 DE112013004359(A5) 申请公布日期 2015.05.21
申请号 DE20131104359T 申请日期 2013.07.19
申请人 OSRAM OLED GMBH 发明人 POPP, MICHAEL;PHILIPPENS, MARC
分类号 C23C16/448;B01B1/00 主分类号 C23C16/448
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