FOREIGN SUBSTANCE DETECTION METHOD, FOREIGN SUBSTANCE DETECTION APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

A foreign substance detection method comprises: a step for measuring surface conditions of a substrate to determine whether a foreign substance is present or not; a step for replacing the substrate on a chuck with a second substrate and measuring surface conditions of the second substrate if it is determined that there is a foreign substance in the determination step; and a step for determining whether the foreign substance determined to be present in the determination step is attached to the substrate based on a measurement result obtained in the measurement step.