发明名称 |
PHYSICAL QUANTITY MEASUREMENT SENSOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity measurement sensor capable of performing high pressure measurement.SOLUTION: The physical quantity measurement sensor comprises: a ceramic package 3B including a circulation hole 31A through which measurement target fluid circulates and which is formed on a plate part 31; an electronic component 4 including a detection element 41 stored in the package 3B and detecting a pressure of the measurement target fluid circulating from the circulation hole 31A; a terminal part 5 provided outside the package 3B; a lid body 6B bonded to a wall part 32 of the package 3B; and a metallic fitting piece 7 attaching the package 3B to an attached member 2. The fitting piece 7 presses the package 3B and locks the attached member 2. |
申请公布号 |
JP2015096843(A) |
申请公布日期 |
2015.05.21 |
申请号 |
JP20130237398 |
申请日期 |
2013.11.15 |
申请人 |
NAGANO KEIKI CO LTD |
发明人 |
IMAI ATSUSHI;MATSUMURA RYOICHI |
分类号 |
G01L9/00;B81B7/02;G01L19/14;H01L23/02;H01L29/84 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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