VACUUM CLEANING DEVICE AND VACUUM CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a vacuum cleaning device and a vacuum cleaning method capable of reducing time required to dry a workpiece and improving overall throughput.SOLUTION: A vacuum cleaning device includes: a vacuum pump; vapor generation means for generating petroleum solvent vapor; a cleaning chamber decompressed by the vacuum pump and for cleaning a workpiece with the vapor supplied from the vapor generation means in the decompressed state; a condensation chamber decompressed by the vacuum pump independently of the cleaning chamber and kept decompressed state; temperature keeping means for keeping the condensation chamber at a lower temperature than that of the cleaning chamber; and an on/off valve for communicating the condensation chamber with the cleaning chamber or cutting off communication of the condensation chamber with the cleaning chamber. The on/off valve communicates the cleaning chamber with the condensation chamber kept at the lower temperature than that of the cleaning chamber after the vapor is supplied into the cleaning chamber and the workpiece is cleaned.