| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method of a mold having energy ray curing resin residue on a surface, the cleaning method thereof capable of suppressing occurrence of a defect in a fine rugged structure transferred from the mold posterior to cleaning.SOLUTION: A cleaning method of a mold for removing curable resin containing at least one kind of acrylic active energy ray curing resin residue on a surface of the mold having a fine rugged structure comprising a plurality of recessed portions formed at a cycle equal to a wavelength in a visible light region or less on the surface includes: a first cleaning step of cleaning the surface of the mold by using solvent in which a swelling ratio of the curable resin is equal to 3% or more; and a second cleaning step of cleaning the surface of the mold by using solvent dissolving in the solvent used in the first cleaning step in a compatible manner and having a vapor pressure ranging 2 to 10 kPa at 20°C prior to drying of the mold subjected to the first cleaning step. |
