发明名称 HIGH-FREQUENCY POWER SUPPLY
摘要 PROBLEM TO BE SOLVED: To prevent vibration occurring at the time of stopping the output of a high frequency with a simple configuration.SOLUTION: An inverter circuit 3 on-off operates switching elements Q1 to Q4 by drive signals Sto Sto convert DC power into high-frequency power. A driver 8 amplifies drive pulses dv1 to dv4 input from a drive-pulse generating unit 7 and generates the drive signals Sto S. A control unit 9 outputs a drive control signal Sfor controlling the output of the high-frequency power of the inverter circuit 3 to the drive-pulse generating unit 7. The drive-pulse generating unit 7 controls the drive pulses dv1 to dv4 to waveforms that alternately turn on and off the switching elements Q1 and Q4 and the switching elements Q2 and Q3 in a high-level period of the drive control signal S, and controls the drive pulses dv1 to dv4 to waveforms that fix the switching elements Q2 and Q4 to an on state and fix the switching elements Q1 and Q3 to an off state in a low-level period.
申请公布号 JP2015097433(A) 申请公布日期 2015.05.21
申请号 JP20130236378 申请日期 2013.11.15
申请人 DAIHEN CORP 发明人 FUKUMOTO YOSHIKI
分类号 H02M7/48;C23C16/505;H01L21/3065;H05H1/46 主分类号 H02M7/48
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