发明名称 SEMICONDUCTOR DEVICE HAVING BURIED BIT LINES AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes body lines, formed substantially perpendicular to a substrate, and having recessed sidewalls, buried bit lines, buried in the recessed sidewalls, and including a metal silicide, and a barrier layer interposed between each of the buried bit lines and the body lines corresponding thereto, and containing germanium.
申请公布号 US2015140808(A1) 申请公布日期 2015.05.21
申请号 US201414566521 申请日期 2014.12.10
申请人 SK hynix Inc. 发明人 MYUNG Ju-Hyun;HWANG Eui-Seong;PARK Eun-Shil;KIM Tae-Yoon
分类号 H01L21/768;H01L21/324;H01L21/306;H01L21/3205;H01L21/02 主分类号 H01L21/768
代理机构 代理人
主权项
地址 Gyeonggi-do KR