FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS

摘要

A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

主权项

1. A method of manufacturing a micro-electromechanical device, comprising:
forming a metal layer of the micro-electromechanical device on a sacrificial layer of a wafer, wherein the sacrificial layer includes a portion of a substrate of the wafer; electrolessly depositing a soft magnetic material on the metal layer to manufacture the micro-electromechanical device; and removing the sacrificial layer to produce a suspended metal beam coupled to at least one support structure of the wafer.