OBJECTIVE LENS SWITCHING MECHANISM AND INSPECTION APPARATUS

摘要

An objective lens switching mechanism holds a plurality of objective lenses respectively disposed on each of the plurality of lens mounts, moves the plurality of objective lenses between a first position on the lens mounts and a second position above the lens mounts by a rotating mechanism and moves the plurality of objective lenses from the second position above the lens mounts to another second position above the lens mounts.

主权项

1. An objective lens switching mechanism comprising:
a rotating mechanism configured to include a rotating table and a stage disposed on the rotating table; a plurality of lens mounts disposed around the rotating mechanism; a plurality of objective lenses respectively disposed on each of the plurality of lens mounts; a lens holder disposed on the stage of the rotating mechanism and configured to hold each of the plurality of objective lenses; and a plurality of connecting members, which is attached to the lens holder, configured to respectively connect each of the plurality of objective lenses to the lens holder, wherein the objective lenses are moved between a first position on the lens mounts and a second position above the lens mounts by an operation of the stage of the rotating mechanism and are moved from the the second position above the lens mounts to another second position above the lens mounts by an operation of the rotating table, so that one selected from the plurality of objective lenses is disposed on the lens mount of a desired position.